Energy Dispersive Spectrometry

An Energy dispersive X-ray spectrometer (EDS) consists of a solid-state detector which produces pulses proportional in size to the X-ray photon energy, which are sorted electronically by height in order to produce a spectrum. EDS analysis is more convenient to use and faster than Wavelength dispersive spectrometry (WDS), so that can be used for quick, qualitative chemical analysis. Semi-quantitative analysis without standardization is also available, whereas WDS analysis is necessary for more accurate quantification. Both the JSM-5310 and JXA-8900 are available for EDS.